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![]() ![]() For resonant MEMS (microelectromechanical systems) devices, stability is important for good performance.Ī MEMS bulk acoustic wave (BAW) resonator that includes one or more guard rings to create recessed space(s) will be disclosed herein. Microelectronic devices that include frequency selective components are important for many electronic products requiring stable frequency signals or ability to discriminate between signals based on frequency diversity. In the drawings, like elements are denoted by like reference numerals for consistency. DETAILED DESCRIPTION OF EMBODIMENTS OF THE DISCLOSURE ![]() 10 is a flow chart illustrating design of a MEMS resonator device. 9 is a cross sectional view of an example package integrated circuit that includes the example MEMS acoustic wave resonator of FIG. 8 is a cross section view another example MEMS resonator that is a fully released resonator structure.įIG. 7 is a top view of the example MEMS acoustic wave resonator device of FIG. 6 is a cross sectional view of an example MEMS acoustic wave resonator device with periodic guard rings to create periodic recessed spaces.įIG. 5 is a Smith chart illustrating operation of the MEMS resonator device of FIG. 4 is a cross sectional view of another example MEMS acoustic wave resonator device having a guard ring with a recessed space to the edge of the electrode.įIG. 3 is cross sectional view of an example MEMS acoustic wave resonator device having a guard ring with a recessed space to the edge of the electrode.įIG. ![]() 2 is a set of Smith charts illustrating operation of a prior art MEMS acoustic wave resonator device.įIG. 1 is a schematic of an example oscillator circuit that includes a MEMS acoustic wave resonator device.įIG. A first guard ring is positioned on the second electrode spaced from the perimeter edge of the second electrode, wherein the first guard ring has a thickness and a width and is spaced from the perimeter edge of the second electrode by a distance. The piezoelectric member has a first electrode covering a first surface of the piezoelectric member and a second electrode covering a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge. A piezoelectric member is mounted on the base substrate. SUMMARY OF THE DISCLOSUREĪn example of the present disclosure provides a MEMS acoustic wave resonator that is formed on a base substrate. Otis, “A 22 μW, 2.0 GHz FBAR oscillator,” 2011 IEEE Radio Frequency Integrated Circuits Symposium, Baltimore, Md., 2011, pp. Chandrakasan, “A 0.68V 0.68 mW 2.4 GHz PLL for Ultra-Low Power RF Systems.” 2015 IEEE Radio Frequency Integrated Circuits Symposium (RFIC) (May 2015) A. Several types of MEMS acoustic wave resonator-based oscillators are known, see for example: Paidimarri, Arun, Nathan Ickes, and Anantha P. Aluminum nitride and zinc oxide are two common piezoelectric materials used in MEMS acoustic wave resonators. BAW resonators using piezoelectric films with thicknesses ranging from several micrometers down to tenth of micrometers resonate in the frequency range of roughly 100 MHz to 10 GHz. Multiple approaches have been used, such as: wire-bonding, flip-chip, CMOS-MEMS, etc.Ī bulk acoustic wave (BAW) resonator is a MEMS device that includes a piezoelectric thin film sandwiched between two electrodes and acoustically isolated from the surrounding medium. Integrating the MEMS resonators with the integrated circuit chips in a regular semiconductor packaging is usually a challenging aspect of such devices. Microelectromechanical system (MEMS) resonators are used for multiple applications, among them low-power, low-phase noise, high stability oscillators. This disclosure relates to bulk acoustic wave resonators that have guard rings having recessed space from electrode edge and periodic designs. ![]() ![]() ![]()
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RHP Jack Flaherty (right shoulder strain) is expected to throw 65-70 pitches for Double-A Springfield on Sunday. … RHP Chad Kuhl (right hip flexor strain) will make a rehab start for Triple-A Albuquerque on Saturday night.Ĭardinals: LHP Steven Matz (left MCL tear) will throw off a mound this weekend. Rockies: C Elias Diaz (left wrist sprain) took swings Thursday and is playing catch pain free. Louis went 5-1 in the games against Colorado and Milwaukee. It was their first errorless homestand of six or more games since Aug. The Cardinals did not commit an error in any of the six games during the homestand. It is the second-longest home winning streak against a club for the Cardinals, one shy of their 13 in a row against the Cubs from Oct. The Cardinals’ win streak over the Rockies at Busch dates to Aug. The right-hander is 0-5 with a 6.41 ERA in his eight road starts this season. Senzatela (3-7) struggled prior to his injury, giving up five runs in 1 2/3 innings. Paul Goldschmidt added two doubles and a single. Genesis Cabrera and Chris Stratton each pitched a scoreless inning of relief to complete the four-hitter. They were incredible you know and Albert hitting the grand slam, I mean we’re just kind of like living in his shadow right, which is where we should be.” “My job today it was just to not mess it up,” he said. He struck out seven, walked none and retired his final 13 batters. Wainwright (10-9) gave up three hits, two of them infield singles. “I think at the end of the day, just being part of a great organization, a great group of guys that want to win, young players they’re watching, I’m blessed to be here, and just help those guys out,” Pujols said. We felt good about it and he did his job.” “The game’s never over, but you can put the game away there with a good swing and it’s always good to get the crowd engaged. “He’s been killing lefties,” Marmol said. It was Pujols’ 16th career grand slam – his first as a pinch hitter – and it moved him into a tie with Hank Aaron, Babe Ruth and Dave Kingman for 10th-most slams of all-time.Ĭardinals manager Oliver Marmol said went with the unconventional decision to pinch-hit Pujols in the third inning for designated hitter Brendan Donovan because he liked the matchup against Gomber. Pujols hit his 690th career home run, connecting off Austin Gomber and capping a five-run third that made it 10-0. Louis has won 12 of its last 13 home games and has taken 12 straight from the Rockies at Busch Stadium. The NL Central-leading Cardinals won their fourth in a row and sent Colorado to its fifth straight loss. How significant? We won’t know until tomorrow. “He definitely has a (left) knee sprain to a certain extent. “Antonio is going to get a MRI in the morning,” Black said. Both players will be re-evaluated tomorrow. He wasn’t as confident on Senzatela’s outlook. Rockies manager Bud Black said Blackmon is not expected to go on the injured list, but will probably not start in the next game. Senzatela crumpled to the ground after attempting to cover first base and Blackmon was removed an inning after beating out an infield single. The Rockies lost starting pitcher Antonio Senzatela and right fielder Charlie Blackmon in the second inning to leg injuries. Pujols is 42, two years older than Wainwright. ![]() The Elias Sports Bureau said the Cardinals were the first team in big league history to have a player at least 40 years old hit a grand slam and another at least 40 to pitch seven shutout innings in the same game. “This is what he’s supposed to look like, here this stadium, doing these things.” “He looks the same as when he left to me,” Wainwright said. Now we’re playing the best baseball we have played all year long.” “We didn’t, but we had some glimpses here and there. ![]() “We’re playing right now, I think the way that we were expecting ourselves to play early in the year,” Pujols said. Louis Cardinals routed the Colorado Rockies 13-0 Thursday for a three-game sweep. LOUIS – Albert Pujols launched a pinch-hit grand slam and drove in five runs, Adam Wainwright pitched seven sharp innings and the St. ![]() ![]() ![]() Spa and gym facilities at this property are unavailable due to Coronavirus (COVID-19).ĭue to Coronavirus (COVID-19), this property adheres to strict physical distancing measures.ĭue to Coronavirus (COVID-19), please ensure that you are only booking this property following the local government guidelines of the destination, including but not limited to the purpose of travel, and maximum allowed group size.ĭue to Coronavirus (COVID-19), wearing a face mask is mandatory in all indoor common areas. In accordance with government guidelines to minimise transmission of the Coronavirus (COVID-19), this property may request additional documentation from guests to validate identity, travel itinerary and other relevant information, during dates where such guidelines exist. Certain services and amenities may be reduced or unavailable as a result.ĭue to Coronavirus (COVID-19), this property has reduced reception and service operating hours. If it isn't provided, your booking will be cancelled on arrival.Īs a result of Coronavirus (COVID-19), this property has temporarily suspended its shuttle services.ĭue to Coronavirus (COVID-19), this property is taking steps to help protect the safety of guests and staff. Reasonable evidence must be provided on arrival. In accordance with government guidelines to minimise transmission of the Coronavirus (COVID-19), this property can only accept bookings from essential workers/permitted travellers, during dates where such guidelines exist. ![]() In response to Coronavirus (COVID-19), additional safety and sanitation measures are in effect at this property.įood & beverage services at this property may be limited or unavailable due to Coronavirus (COVID-19). In accordance with government guidelines to minimise transmission of the Coronavirus (COVID-19), this property currently isn't accepting guests from certain countries, during dates where such guidelines exist. The property will contact you after you book to provide instructions. Payment before arrival via bank transfer is required. Please note that all Special Requests are subject to availability and additional charges may apply. 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Deliver Us The Moon PS5 Review - July 12, 2022.Time on Frog Island Review PS5 - July 13, 2022.Stray PS5 Review – A Phenomenal Feline Adventure - July 28, 2022.Outside of gaming, Callum loves skateboarding despite his immediate family telling him to grow up and he is also known to watch the British sitcom Peep Show on repeat and will go toe-to-toe with anyone on Peep Show trivia. Basically, you name it, and Callum was probably there or somewhere on the periphery. Callum has been around the block within the gaming industry, working as an Editor-in-chief for a number of well-respected gaming outlets, he has worked as a games tester, he has gaming podcast experience, has worked in gaming PR. Plus, he’s even got a tattoo of The Traveller from Journey, so you know that love for indies is legit! While overseeing the day-to-day running of the site, you’ll commonly see Callum carve out some time to produce some content on one of his favorite games of all time, and lead from the front. He loves nothing more than finding an unearthed early-access title and seeing what they have to offer. Callum is the gaming managing editor and a gamer who will always try to shine a spotlight on indie games before giving AAA titles the time of day. ![]() |
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